〔閲覧〕【著作】(Basak Durga/山下 憲二/菅原 智也/Fareed Qhalid/中川 大輔/[西野 克志]/[酒井 士郎]/Reactive ion etching of GaN and AlxGa1-xN using Cl2/CH4/Ar plasma/[Japanese Journal of Applied Physics, Part 1 (Regular Papers & Short Notes)])
(resolved by 0021-4922) ISSN: 0021-4922
(pISSN: 0021-4922, eISSN: 1347-4065) Title: Japanese journal of applied physics (2008) Title(ISO): Jpn J Appl Phys (2008) Supplier: 社団法人応用物理学会 Publisher: Japan Society of Applied Physics (NLM Catalog) (Webcat Plus) (Webcat Plus) (Webcat Plus) (Scopus) (Scopus) (Scopus) (CrossRef)
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(resolved by 1347-4065) ISSN: 0021-4922
(pISSN: 0021-4922, eISSN: 1347-4065) Title: Japanese journal of applied physics (2008) Title(ISO): Jpn J Appl Phys (2008) Supplier: 社団法人応用物理学会 Publisher: Japan Society of Applied Physics (NLM Catalog) (Webcat Plus) (Webcat Plus) (Webcat Plus) (Scopus) (Scopus) (Scopus) (CrossRef)
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38
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4B
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2646 2651
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西暦 1999年 4月 30日 (平成 11年 4月 30日)
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和文冊子 ●
Durga Basak, Kenji Yamashita, Tomoya Sugahara, Qhalid Fareed, Daisuke Nakagawa, Katsushi NishinoandShiro Sakai : Reactive ion etching of GaN and AlxGa1-xN using Cl2/CH4/Ar plasma, Japanese Journal of Applied Physics, Part 1 (Regular Papers & Short Notes), Vol.38, No.4B, 2646-2651, 1999.
欧文冊子 ●
Durga Basak, Kenji Yamashita, Tomoya Sugahara, Qhalid Fareed, Daisuke Nakagawa, Katsushi NishinoandShiro Sakai : Reactive ion etching of GaN and AlxGa1-xN using Cl2/CH4/Ar plasma, Japanese Journal of Applied Physics, Part 1 (Regular Papers & Short Notes), Vol.38, No.4B, 2646-2651, 1999.
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