〔閲覧〕【著作】(Tatsuoka Yasuaki/Uemura Masaya/[北田 貴弘]/Shimomura Satoshi/Hiyamizu Satoshi/Substrate temperature dependence of surface migration of As atoms during molecular beam epitaxy of GaAsP on a (411)A GaAs substrate/[Journal of Crystal Growth])
(英) Substrate temperature dependence of surface migration of As atoms during molecular beam epitaxy of GaAsP on a (411)A GaAs substrate (日)
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(英) Surface migration lengths of As adatoms on (411)A GaAs surfaces during molecular beam epitaxy were determined for the rst time from lateral proles of the arsenic content (x) in the GaAsxP1-x layers grown on GaAs channeled substrates (CSs) using As4 and P2 beams. The x on the (411)A side-slope region near the edge of the (100) region increased from that on the at (411)A GaAs substrate, indicating that As adatoms ow from the (100) region to the (411)A side-slope region. The observed surface migration length of As adatoms was 15±2μm on the (411)A GaAs surface at 5358. The surface migration length of As adatoms on (411)A GaAs surface slightly increases to 20±2μm with increase of the substrate temperature to 605. The substrate temperature (Ts) dependence of surface migration length of As adatoms on the (411)A GaAs surface is discussed. (日)
Yasuaki Tatsuoka, Masaya Uemura, Takahiro Kitada, Satoshi ShimomuraandSatoshi Hiyamizu : Substrate temperature dependence of surface migration of As atoms during molecular beam epitaxy of GaAsP on a (411)A GaAs substrate, Journal of Crystal Growth, Vol.227-228, (号), 266-270, 2001.
欧文冊子 ●
Yasuaki Tatsuoka, Masaya Uemura, Takahiro Kitada, Satoshi ShimomuraandSatoshi Hiyamizu : Substrate temperature dependence of surface migration of As atoms during molecular beam epitaxy of GaAsP on a (411)A GaAs substrate, Journal of Crystal Growth, Vol.227-228, (号), 266-270, 2001.
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