(英) Journal of Vacuum Science & Technology B (日)(読)
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2.
(英) J. Avc. Sci. Technol. B (日) Journal of Vacuum Science and Technology B (読)
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3.
(英) JVST B (日) Microelectronics and Nanometer Structures: Processing, Measurement, and Phenomena (読)
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○ISSN :
□
1071-1023
ISSN: 1071-1023
(pISSN: 1071-1023, eISSN: 0734-211X) Title: Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society Title(ISO): J Vac Sci Technol B Microelectron Nanometer Struct Process Meas Phenom Publisher: American Institute of Physics (NLM Catalog) (Scopus) (Scopus) (CrossRef) (CrossRef)
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○eISSN :
□
0734-211X
ISSN: 1071-1023
(pISSN: 1071-1023, eISSN: 0734-211X) Title: Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society Title(ISO): J Vac Sci Technol B Microelectron Nanometer Struct Process Meas Phenom Publisher: American Institute of Physics (NLM Catalog) (Scopus) (Scopus) (CrossRef) (CrossRef)
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