〔閲覧〕【著作】(三木 靖浩/谷口 正/[英 崇夫]/[日下 一也]/[松英 達也]/X-ray Stress Measurement and Mechanical Properties of TiN Films Coated on Aluminum and Aluminum Alloy Substrates by Arc Ion Plating and Ion Beam Mixing/[Materials Science Research International])
(英) X-ray Stress Measurement and Mechanical Properties of TiN Films Coated on Aluminum and Aluminum Alloy Substrates by Arc Ion Plating and Ion Beam Mixing (日)
[継承]
○副題(任意):
○要約(任意):
□
(英) TiN coatings on cutting tools have greatly succeeded in prolongation of tool lives. In the present study, TiN film deposition was tried on a surface of aluminum and aluminum alloy substrates by means of an arc ion plating (AIP) method and an ion beam mixing (IBM) method. The aim is to develop aluminum-based materials having strong wear resistance. In order to examine the hardness and residual stress of TiN films, the bias the voltage and N2 gas pressure were varied in the AIP treatment and the titanium deposition rate was changed in the IBM treatment. Vickers hardness test revealed high values (HV=1800∼2400). The TiN films coated by the AIP and the IBM methods exhibited very high {111} and {110} preferred orientations, respectively. The two-exposure X-ray stress measuring method was used to measure residual stresses in the TiN film. Large compressive residual stresses of -6.3∼ -2.3 GPa were developed at lower N2 gas pressures for the AIP method and at higher Ti deposition rates for the IBM method. A wear experiment was also made with a ball-on-disk type wear testing machine. The depth and the width of wear traces on the surface of specimens were greatly reduced when TiN coatings were applied. (日) 工具上のTiNの被覆は工具寿命のprolongationに大きく成功した.本研究で,アークイオンプレーティング(AIP)法およびイオンミキシング(IBM)法によってアルミニウムおよびアルミニウム合金の表面にTiN膜の堆積を試みた.アルミニウム基の材料に耐摩耗特性を持たせることを目的とする.TiN膜の硬さおよび残留応力を調べるために,AIP処理においてバイアス電圧およびN2ガス圧を変化させ,IBM処理において堆積率を変化させた.ヴィッカース硬さ試験において高い値(HV=1800~2400)を示した.AIPおよびIBM法によって被覆されたTiN膜は,それぞれ高い{111}および{110}優先配向を示した.TiN膜の残留応力を測定するために2点傾斜X線応力測定法を用いた.-6.3∼-2.3 GPaの大きな圧縮残留応力が,AIP法においては低いN2ガス圧で,IBM法においては高いTi堆積率で発生した.ボール·オン·ディスク型磨耗試験機を用いて磨耗試験もまた行った.TiN皮膜を付けたとき,試料表面の磨耗痕の深さと幅は著しく減少した.
(resolved by 1341-1683) ISSN: 1341-1683
(pISSN: 1341-1683) Title: Materials science research international Supplier: 社団法人日本材料学会 Publisher: Chapman & Hall (Webcat Plus) (Scopus)
(Scopus information is found. [need login])
Yasuhiro Miki, Tadashi Taniguchi, Takao Hanabusa, Kazuya KusakaandTatsuya Matsue : X-ray Stress Measurement and Mechanical Properties of TiN Films Coated on Aluminum and Aluminum Alloy Substrates by Arc Ion Plating and Ion Beam Mixing, Materials Science Research International, 6, 4, 243-248, 2000.
欧文冊子 ●
Yasuhiro Miki, Tadashi Taniguchi, Takao Hanabusa, Kazuya KusakaandTatsuya Matsue : X-ray Stress Measurement and Mechanical Properties of TiN Films Coated on Aluminum and Aluminum Alloy Substrates by Arc Ion Plating and Ion Beam Mixing, Materials Science Research International, 6, 4, 243-248, 2000.
関連情報
Number of session users = 4, LA = 0.72, Max(EID) = 439029, Max(EOID) = 1162733.