〔閲覧〕【著作】(Higuchi Yu/Uemura Masaya/Masui Yuji/[北田 貴弘]/Shimomura Satoshi/Hiyamizu Satoshi/V/III ratio dependence of surface migration length of As4 molecules during molecular beam epitaxy of GaAsP on (411)A GaAs substrates/[Journal of Crystal Growth])
(英) V/III ratio dependence of surface migration length of As4 molecules during molecular beam epitaxy of GaAsP on (411)A GaAs substrates (日)
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(英) The surface migration length of As4 molecules on (4 1 1)A surfaces during molecular beam epitaxy has been determined from lateral profiles of As content (x) in GaAsxP1-x layers grown on (4 1 1)A GaAs substrates with a (1 0 0) side-slope using As4 and P2 molecular beams. The migration length of As4 molecules on (4 1 1)A surfaces at a substrate temperature of 535°C was found to steeply increase from 4 to 10 μm and saturate to 10 μm with increasing V/III flux ratio. This V/III ratio dependence of migration length of As4 is understood by a proposed model where an As4 molecule is dissociated and incorporated into the crystal phase when an As4 molecule encounters a Ga adatom on the (4 1 1)A surface. Quantitative analysis is made using rate equations based on the model and the experimental results are reproduced with reasonable fitting parameter. (日)