〔閲覧〕【著作】([北田 貴弘]/Aoki Toyohiro/Watanabe Issei/Shimomura Satoshi/Hiyamizu Satoshi/Optimized channel thickness for high electron mobility in pseudomorphic In0.74Ga0.26As/In0.52Al0.48As quantum-well HEMT structures with (411)A super-flat interfaces grown by MBE/[Journal of Crystal Growth])
(英) Optimized channel thickness for high electron mobility in pseudomorphic In0.74Ga0.26As/In0.52Al0.48As quantum-well HEMT structures with (411)A super-flat interfaces grown by MBE (日)
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(英) We have investigated channel thickness (Lw) dependence of transport properties of two-dimensional-electron gas (2DEG) in pseudomorphic In0:74Ga0:26As/In0:52Al0:48As quantum well high electron mobility transistor (QW-HEMT) structures with extremely flat heterointerfaces [(411)A super-at interfaces] grown on (411)A InP substrates by molecular beam epitaxy (MBE). The highest electron mobility of 90,500cm2/Vs (77K) with a sheet carrier concentration (Ns ) of 3.1 1012 cm-2 was observed for the (411)A QW-HEMT structure with Lw=8nm, which is about 1.5 times larger than the best value (μ= 61,000cm2/Vs at 77K) of ever reported electron mobility with a similar Ns of 3.0×1012 cm-2 for the InGaAs/InAlAs QW-HEMT structure grown on a (100) InP substrate. This enhancement of the electron mobility of the (411)A QW-HEMT structure is mainly due to much improved atness of the (411)A InGaAs/InAlAs heterointerfaces compared with those of conventional (100) interfaces, which results in a large reduction of interface roughness scattering of 2DEG. (日)